Morphological and electrical characterization of 130nm Interdigitated Electrode (IDE)

N.K.S Nordin, U. Hashim, A. Ayoib, V. Thivina

Abstract


Biosensor is the application of sensor that widely applied and still progressing until today. One of the applications of biosensor is Interdigitated Electrode (IDE) that composed of finger of electrodes and a pair of pad. Nanogap is the gap between the electrodes that can determine the sensitivity of the device. In this experiment, 130nm of IDE is tested with the electrical measurement and showed the positive result which is 2.0x10-10 at 0.2 V. The Scanning Electron Microscopy (SEM) of the device showed the small gap is used for better sensitivity without deposite anything on the probe. In the future, this IDE can be used for coating with metal oxides for better performance of the device.

Keywords


Interdigitated Electrode (IDE); Electrode Gap; Electrical Measurement (I-V); Scanning Electron Microscopic (SEM)

Full Text:

PDF

References


Jr, F.A., Price, D.T., Bhansali, S., Florida, S., n.d. Optimization of Interdigitated Electrode ( IDE ) Arrays for Impedance Based Evaluation of Hs 578T Cancer Cells.

Pigeon, S., Meunier, M., Sawan, M., Martel, S., 2003. D Esign and F Abrication of a M Icroelectrode a Rray 2, 1–4.

Daniel, D., Gutz, I.G.R., 2005. Microfluidic cells with interdigitated array gold electrodes: Fabrication and electrochemical characterization. Talanta 68, 429–436.

Prasad, R.H., Hashim, U., Foo, K.L., Adam, T., Shafiq, M., 2013. Fabrication and Characterization of IDE Based Sensor through Conventional Lithography Method. Adv. Mater. Res. 832, 517–521.

Rivadeneyra, A., Fernández-Salmerón, J., Banqueri, J., López-Villanueva, J. a., Capitan-Vallvey, L.F., Palma, A.J., 2014. A novel electrode structure compared with interdigitated electrodes as capacitive sensor. Sensors Actuators B Chem. 204, 552–560.

Manzoli, A., de Almeida, G.F.B., Filho, J. a., Mattoso, L.H.C., Riul, A., Mendonca, C.R., Correa, D.S., 2015. Femtosecond laser ablation of gold interdigitated electrodes for electronic tongues. Opt. Laser Technol. 69, 148–153.

Chou, K., Lee, C., 2014. Fabrication of Silver Interdigitated Electrode by a Stamp Method 2014.

Muaz, A.K.M., Hashim, U., Liu, W.W., Ibrahim, F., K.l., T., Mohktar, M.S., 2015. Fabrication of interdigitated electrodes (IDE’s) by conventional photolithography technique for pH measurement using micro-gap structure. IECBES 2014, Conf. Proc. - 2014 IEEE Conf. Biomed. Eng. Sci. “Miri, Where Eng. Med. Biol. Humanit. Meet” 146–150.

Perumal, V., Hashim, U., 2014. Advances in biosensors: Principle, architecture and applications. J. Appl. Biomed. 12, 1–15.

Tseng, C.C., Chou, Y.H., Hsieh, T.W., Wang, M.W., Shu, Y.Y., Ger, M. Der, 2012. Interdigitated electrode fabricated by integration of ink-jet printing with electroless plating and its application in gas sensor. Colloids Surfaces A Physicochem. Eng. Asp. 402, 45–52.

Singh, K. V., Bhura, D.K., Nandamuri, G., Whited, A.M., Evans, D., King, J., Solanki, R., 2011. Nanoparticle-enhanced sensitivity of a nanogap-interdigitated electrode array impedimetric biosensor. Langmuir 27, 13931–13939.

Van Megen, M.J.J., Bomer, J.G., Olthuis, W., Van Den Berg, A., 2014. Solid state nanogaps for electrochemical detection fabricated using edge lithography. Microelectron. Eng. 115, 21–25.

Chen, X., Guo, Z., Yang, G.M., Li, J., Li, M.Q., Liu, J.H., Huang, X.J., 2010. Electrical nanogap devices for biosensing. Mater. Today 13, 28–41.

Ranut, P., 2015. On the effective thermal conductivity of aluminum metal foams: Review and improvement of the available empirical and analytical models. Appl. Therm. Eng. 1–29.

Perumal, V., R. Haarindra Prasad., U.Hashim., Transducer, I.C., 2016. pH Measurement using In House Fabricated.


Refbacks

  • There are currently no refbacks.


Copyright (c) 2017 eProceedings Chemistry

Creative Commons License
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.

Copyright © 2016 Department of Chemistry, Universiti Teknologi Malaysia.

Disclaimer : This website has been updated to the best of our knowledge to be accurate. However, Universiti Teknologi Malaysia shall not be liable for any loss or damage caused by the usage of any information obtained from this web site.
Best viewed: Mozilla Firefox 4.0 & Google Chrome at 1024 × 768 resolution.